+ wishlist Add to Cart The item has been added Author: Jianfeng Luo David A. Dornfeld Integrated Modeling of Chemical Mechanical Planarization for Sub-Micron IC Fabrication: From Particle Scale to Feature, Die and Wafer Scales [9783540223696] List Price As Low as $169.99 Format: Hardcover
+ wishlist Add to Cart The item has been added Author: Jianfeng Luo David A. Dornfeld Integrated Modeling of Chemical Mechanical Planarization for Sub-Micron IC Fabrication: From Particle Scale to Feature, Die and Wafer Scales [9783642061158] List Price As Low as $169.99 Format: Paperback