Overview
Alexey Ivanov investigates the application of a silicon anodization process as a three-dimensional structuring technique, where silicon is transformed into porous silicon as a sacrificial layer or directly dissolved in electropolishing regime. The work contains a detailed state of the art, experimental studies and modeling of the process for basic shape controlling techniques. Limitations of the developed FEM model with secondary current distribution are discussed.
The book, Silicon Anodization as a Structuring Technique: Literature Review, Modeling and Experiments [Bulk, Wholesale, Quantity] ISBN#9783658192372 in Paperback by Alexey Ivanov may be ordered in bulk quantities. Minimum starts at 25 copies. Availability based on publisher status and quantity being ordered.
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