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Spectroscopic Ellipsometry: Principles and Applications book cover by Hiroyuki Fujiwara
Hardcover

Spectroscopic Ellipsometry: Principles and Applications

by Hiroyuki Fujiwara

$220.11 / copy at 25+ copies As low as $207.16 at 1,000+Your best volume price

Total $5,502.75

Hardcover · 392 pages Wiley · 2007

Format

Hardcover
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About the book

Spectroscopic Ellipsometry

Ellipsometry is a powerful tool used for the characterization of thin films and multi-layer semiconductor structures. This book deals with fundamental principles and applications of spectroscopic ellipsometry (SE). Beginning with an overview of SE technologies the text moves on to focus on the data analysis of results obtained from SE, Fundamental data analyses, principles and physical backgrounds and the various materials used in different fields from LSI industry to biotechnology are described. The final chapter describes the latest developments of real-time monitoring and process control which have attracted significant attention in various scientific and industrial fields.

The book, Spectroscopic Ellipsometry: Principles and Applications [Bulk, Wholesale, Quantity] ISBN#9780470016084 in Hardcover by Hiroyuki Fujiwara may be ordered in bulk quantities. Minimum starts at 25 copies. Availability based on publisher status and quantity being ordered.

Details

Publisher
Wiley
Author
Hiroyuki Fujiwara
Format
Hardcover
Published
Mar 19, 2007
ISBN-13
9780470016084
Pages
392
Carton quantity
18 copies
Printing
Printed on demand
Buying for a group

Spectroscopic Ellipsometry in bulk: pricing

Volume pricing applies automatically in your cart. No codes, no account needed.

CopiesPrice per copyYou save
25 – 99 $220.11 15% off list
100 – 249 $217.52 16% off list
250 – 499 $214.93 17% off list
500 – 999 $212.34 18% off list
1,000+ $207.16 20% off list
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