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Microsystem Technology and Microrobotics book cover by Sergej Fatikow, Ulrich Rembold
Hardcover

Microsystem Technology and Microrobotics

by Sergej Fatikow and Ulrich Rembold

From $149.59 / copy at 25+ copies; lower per-copy prices at higher quantities (see Volume pricing) As low as $146.19 at 100+

Total $3,739.75

Hardcover · 408 pages Springer Berlin Heidelberg · 1997

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Hardcover
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About the book

Microsystem Technology and Microrobotics

Microsystem technology (MST) integrates very small (up to a few nanometers) mechanical, electronic, optical, and other components on a substrate to construct functional devices. These devices are used as intelligent sensors, actuators, and controllers for medical, automotive, household and many other purposes. This book is a basic introduction to MST for students, engineers, and scientists. It is the first of its kind to cover MST in its entirety. It gives a comprehensive treatment of all important parts of MST such as microfabrication technologies, microactuators, microsensors, development and testing of microsystems, and information processing in microsystems. It surveys products built to date and experimental products and gives a comprehensive view of all developments leading to MST devices and robots.

Details

Publisher
Springer Berlin Heidelberg
Authors
Sergej Fatikow, Ulrich Rembold
Format
Hardcover
Published
Mar 20, 1997
ISBN-13
9783540606581
Pages
408
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CopiesPrice per copyYou save
25 – 49 $149.59 12% off list
50 – 99 $147.89 13% off list
100+ $146.19 14% off list
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