Mikrosystemtechnik: Prozessschritte, Technologien, Anwendungen book cover by Ulrich Hilleringmann

Mikrosystemtechnik: Prozessschritte, Technologien, Anwendungen [9783835100039]

Name: Mikrosystemtechnik: Prozessschritte, Technologien, Anwendungen [9783835100039]
SKU: 9783835100039
Availability: InStock

Author: Ulrich Hilleringmann

Paperback

SKU: 9783835100039

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Format Lightweight and affordable. Perfect for student groups and classrooms, and a versatile option for corporate trainings, team reads, or large-scale events.

Paperback

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Overview

Dieses Lehr- und Nachschlagebuch erläutert die grundlegenden Prozessschritte der Mikrotechnologien für Elektronik, Mechanik und Optik. Darauf aufbauend folgen die Verknüpfungen der Einzelprozesse zur Mikrosystemtechnik. Die möglichen Schnittstellen Mechanik/Elektronik, Optik/Elektronik und Optik/Mechanik werden anhand konkreter mikrosystemtechnischer Bauelemente vorgestellt. Die jeweiligen Vorteile der Oberflächenmikromechanik und der Bulk-Mikromechanik werden anhand der erforderlichen Prozesstechnik zur Integration mikrosystemtechnischer Sensoren und Aktoren diskutiert und bezüglich ihrer Kompatibilität zur Mikroelektronik bewertet.

The book, Mikrosystemtechnik: Prozessschritte, Technologien, Anwendungen [Bulk, Wholesale, Quantity] ISBN#9783835100039 in Paperback by Ulrich Hilleringmann may be ordered in bulk quantities. Minimum starts at 25 copies. Availability based on publisher status and quantity being ordered.

Details

Author:

Ulrich Hilleringmann

Format:

Paperback

Publication Date:

04/25/2006

ISBN-13:

9783835100039

Pages:

274

Publisher:

Vieweg+Teubner Verlag

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