Silicon Semiconductor Technology: Processing and Integration of Microelectronic Devices
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Fulfillment optionsSilicon Semiconductor Technology
The book presents the basic steps and the technical implementation of individual processes for microelectronic circuit integration in silicon. Interaction and influences of e. g. oxidation, etching, doping and thermal processes for integrating CMOS- and Bipolar circuits are discussed in detail, beginning with the purification of silicon up to the encapsulated integrated circuit. It includes modern processes like atomic layer deposition and etching for nanoscale structures and compares improvements like silicide contacts, copper metallization, high-k dielectrics, and SOI and FINFET structures. All processes are presented looking from the process engineer’s view.
The book, Silicon Semiconductor Technology: Processing and Integration of Microelectronic Devices [Bulk, Wholesale, Quantity] ISBN#9783658410407 in Paperback by Ulrich Hilleringmann may be ordered in bulk quantities. Minimum starts at 25 copies. Availability based on publisher status and quantity being ordered.
Details
- Publisher
- Springer Fachmedien Wiesbaden
- Author
- Ulrich Hilleringmann
- Format
- Paperback
- Published
- Aug 3, 2023
- ISBN-13
- 9783658410407
- Pages
- 264
- Printing
- Printed on demand
Silicon Semiconductor Technology for groups: pricing
Volume pricing applies automatically in your cart. No codes, no account needed.
| Copies | Price per copy | You save |
|---|---|---|
| 25 – 49 | $70.39 | 12% off list |
| 50 – 99 | $69.59 | 13% off list |
| 100+ | $68.79 | 14% off list |
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