Specialty Gas Analysis: A Practical Guidebook book cover by

Specialty Gas Analysis: A Practical Guidebook [9780471185987]

Hardcover

SKU: 9780471185987

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Format Sturdy and long-lasting. Ideal for libraries and classrooms, and a polished choice for corporate gifts, leadership programs, or event takeaways.

Hardcover

Price $279.95

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Overview

The semiconductor industry is moving toward gas-phase reagents, increasing the relative importance of gas purity. Anyone who deals in the manufacturing of these devices needs to understand the technology available for modern gas analysis. Most specialty gas vendors have some re in place for quality assurance, but these usually are very simplistic and outdated methods. No book was available that gave guidance on providing accurate, reproducible data on specialty gas products. This is the first book that provides an introduction to current analytical methods and equipment for the analysis of high- purity gases used in the semiconductor industry and related fields.

The book, Specialty Gas Analysis: A Practical Guidebook [Bulk, Wholesale, Quantity] ISBN#9780471185987 in Hardcover by may be ordered in bulk quantities. Minimum starts at 25 copies. Availability based on publisher status and quantity being ordered.

Details

Format:

Hardcover

Publication Date:

12/27/1996

ISBN-13:

9780471185987

Pages:

Publisher:

Wiley

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