Nanopositioning Technologies: Fundamentals and Applications book cover by

Nanopositioning Technologies: Fundamentals and Applications [9783319795393]

Paperback

SKU: 9783319795393

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Paperback

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Overview

This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies and control methods for nanopositioning. This is an ideal book for mechanical and electrical engineering students and researchers; micro and nanotechnology researchers and graduate students; as well as those working in the precision instrumentation or semiconductor industries.

The book, Nanopositioning Technologies: Fundamentals and Applications [Bulk, Wholesale, Quantity] ISBN#9783319795393 in Paperback by may be ordered in bulk quantities. Minimum starts at 25 copies. Availability based on publisher status and quantity being ordered.

Details

Format:

Paperback

Publication Date:

03/30/2018

ISBN-13:

9783319795393

Pages:

Publisher:

Springer International Publishing

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